石英（Quartz）精密陶瓷｜材料特性與應用產業
材料介紹
石英（Quartz）是一種高純度、化學穩定性極佳的非晶矽氧化物材料， 廣泛應用於半導體、光電、顯示、雷射與生醫產業。 具備極低熱膨脹係數、高耐熱性、高透光性與抗腐蝕性，適合高溫與高潔淨製程環境。
材料特性
- 高純度（SiO₂ > 99.99%），低金屬雜質
- 極低熱膨脹係數（0.5 × 10⁻⁶/K），高尺寸穩定性
- 耐高溫可達 1100~1300°C
- 優異抗酸蝕與等離子體穩定性
- UV~IR 光譜透光佳，適用光學與雷射應用
- 無氣體釋放，真空與潔淨製程適用
應用產業
- 半導體：石英管、托盤、CHUCK、CVD罩、晶舟結構件
- 光電 / 面板：透明視窗、雷射傳光蓋板、吸附平台
- 生醫 / 實驗室：分析窗口、流體導管、儲存槽、CIP/SIP 結構件
Quartz Ceramics｜Material Features & Industrial Applications
Material Overview
Quartz (SiO₂) is a high-purity, chemically inert ceramic widely used in semiconductor, display, laser optics, and biomedical industries. It features extremely low thermal expansion, high heat resistance, excellent transmittance, and corrosion resistance. Ideal for high-temperature and vacuum environments.
Key Properties
- High purity (SiO₂ > 99.99%), ultra-low metal contamination
- Very low thermal expansion (0.5 × 10⁻⁶/K)
- High heat resistance: 1100–1300°C
- Strong acid and plasma corrosion resistance
- Excellent light transmittance (UV–IR range)
- Low outgassing – vacuum and cleanroom compatible
Industry Applications
- Semiconductor: quartz tubes, trays, wafer chucks, CVD chambers
- Display / Optics: laser windows, viewing panels, vacuum holders
- Biomedical / Labs: flow tubes, CIP/SIP isolators, optical sample cells
