石英Quartz

石英（Quartz）｜高純度低熱膨脹光電半導體專用材料

材料特性

石英玻璃（Quartz）是由高純度 SiO₂ 組成的特殊材料，具有極低熱膨脹、高透明度、高耐熱性、極佳的化學穩定性與低金屬污染特性，廣泛應用於半導體製程、光電模組、實驗設備與太陽能產線中。

常見應用

• 半導體晶圓製程：加熱托盤、LPCVD 管、載具、密封環
• PECVD / CVD 製程用石英艙體、反應艙結構
• 光電設備中的雷射窗口 / 石英透鏡 / UV濾光片
• LED 晶粒搬運支架 / 清洗罩 / 石英治具
• 實驗室器皿、滅菌爐視窗、微量樣本盤

優勢特性

• 純度達 99.99%以上，無鹼金屬離子污染
• 熱膨脹係數極低（5.5 × 10⁻⁷ /°C）
• 可耐高溫至 1100°C 以上
• 可客製厚薄、槽孔、黏接、焊接設計

Quartz Glass｜Ultra-Pure, Low Thermal Expansion Material for Semiconductor & Optical Use

Material Features

Quartz glass (fused silica) is composed of ultra-pure SiO₂ and provides low thermal expansion, high thermal resistance, excellent chemical stability, and optical transparency. It is ideal for semiconductor, optoelectronic, solar, and lab applications.

Applications

• Wafer process: heating trays, LPCVD tubes, carriers, seals
• CVD / PECVD chamber liners and vessels
• Laser windows, quartz lenses, UV filters in optical modules
• LED supports, cleaning hoods, alignment tools
• Labware, sterilization windows, micro sample trays

Advantages

• Purity ≥ 99.99%, alkali-free and low contamination
• Very low CTE: 5.5 × 10⁻⁷ /°C
• Thermal endurance > 1100°C
• Supports custom bonding, welding, slotting, polishing