氮化矽精密陶瓷｜材料特性與應用產業
材料介紹
氮化矽（Silicon Nitride, Si₃N₄）是一種兼具高強度、高韌性、熱震穩定與耐磨性的精密陶瓷材料。 適用於高速運動、高溫變化、抗裂需求與長壽命製程環境，廣泛應用於半導體、光電、生醫、自動化與傳產等產業。
材料特性
- 高斷裂韌性與彎曲強度
- 耐急冷急熱，熱震穩定性優異
- 熱膨脹低，尺寸穩定性好
- 高硬度、耐磨耗（Mohs 8.5）
- 良好絕緣性，亦可製成抗靜電／導電型
- 密度低，適用輕量化與高速旋轉應用
應用產業
- 半導體：晶圓夾具、吸盤、機構滑塊、CVD隔熱墊
- 光電面板：定位塊、真空吸附平台、雷射接觸結構
- 生醫／化學：陶瓷軸套、滑動件、真空固定結構
- 機械／新能源：陶瓷軸承、EV馬達陶瓷球、高溫隔熱模組
Silicon Nitride Ceramics｜Properties & Industry Applications
Material Overview
Silicon nitride (Si₃N₄) is a high-performance ceramic featuring excellent strength, toughness, thermal shock resistance, and low density. It is ideal for dynamic and harsh environments such as semiconductor, optoelectronics, biomedical, mechanical, and automation industries.
Key Properties
- High fracture toughness and flexural strength
- Exceptional thermal shock resistance
- Low thermal expansion for superior dimensional stability
- High hardness and wear resistance (Mohs ~8.5)
- Good insulation; conductive / ESD-safe options available
- Low density, suitable for lightweight and rotational parts
Industry Applications
- Semiconductor: Wafer chucks, vacuum pads, sliders, CVD insulation plates
- Display / Optics: Positioning bases, vacuum platforms, laser fixtures
- Biomedical / Chemical: Ceramic bushings, slide parts, clean fixtures
- Machinery / EV: Bearing balls, motor ceramics, high-temp insulators
