碳化矽精密陶瓷｜材料特性與應用產業
材料介紹
碳化矽（Silicon Carbide, SiC）是一種兼具高硬度、高熱導性與耐等離子體侵蝕的先進陶瓷材料， 廣泛應用於半導體製程、光電模組、化工、航太與高潔淨應用領域。 有 SSic規格。
材料特性
- 高熱導率（120–200 W/m·K），散熱效率高
- 超高硬度，僅次於鑽石，具優異耐磨性
- 耐等離子體與化學腐蝕，適用蝕刻與清洗製程
- 高溫穩定性好（耐溫超過1600°C），抗熱衝擊能力佳
- 表面潔淨度高，適用超純環境
應用產業
- 半導體：蝕刻腔體、CVD電極、SiC加熱器、晶圓托盤
- 光電顯示：雷射平台、吸附台、鍍膜夾具、玻璃夾座
- 生醫／化工：耐腐閥芯、噴嘴、流體密封、活塞模塊
- 航太／新能源：隔熱板、渦輪部件、EV陶瓷散熱片
Silicon Carbide Ceramics｜Properties & Industrial Applications
Material Overview
Silicon carbide (SiC) is a high-performance ceramic known for its extreme hardness, excellent thermal conductivity, and plasma resistance. It is widely used in semiconductor tools, optical platforms, chemical handling, aerospace components, and cleanroom applications. Types include SSiC, RBSiC, and recrystallized SiC.
Key Properties
- High thermal conductivity (120–200 W/m·K)
- Very high hardness – second only to diamond
- Excellent plasma and chemical resistance
- Thermal stability > 1600°C, excellent thermal shock resistance
- Low particle generation, suitable for clean processes
Industry Applications
- Semiconductor: Etching chambers, CVD parts, SiC heaters, wafer chucks
- Display & Optics: Laser stages, vacuum platforms, coating fixtures
- Biomedical / Chemical: Valve cores, spray nozzles, seals, plungers
- Aerospace / EV: Heat shields, turbine inserts, ceramic cooling blocks
