氮化矽（Silicon Nitride, Si₃N₄）精密陶瓷材料

氮化矽陶瓷（Si₃N₄）｜耐熱衝擊與高速機構陶瓷材料

材料特性

氮化矽（Si₃N₄）陶瓷具備低密度、高強度、極佳抗熱震與抗彎性，並擁有出色的耐磨耗與絕緣性，非常適合應用於高速轉動、極端熱變化、潔淨製程等領域。常用於軸承、滑塊、定位針、導輪、壓頭等高精度零件。

應用領域

• 高速軸承 / 滾輪 / 滑塊
• 晶圓製程定位針 / 絕緣柱
• 熱處理模組 / RTP快速升降盤
• 自動化導引零件 / 電子測試夾具
• 高壓閥座 / 絕緣噴嘴 / 燃燒元件

材料特性指標

• 密度約 3.2 g/cm³（比氧化鋁、氧化鋯輕）
• 耐熱衝擊性極佳，可承受快速升溫/冷卻
• 高強度、高斷裂韌性、耐磨耗
• 低熱膨脹、絕緣性佳、化學穩定性強

Silicon Nitride (Si₃N₄) Ceramic｜High-Strength & Thermal Shock-Resistant Ceramic

Material Properties

Silicon nitride (Si₃N₄) is a lightweight, high-performance ceramic offering excellent strength, thermal shock resistance, wear resistance, and electrical insulation. It is ideal for high-speed motion systems, thermal modules, semiconductor tools, and aerospace components.

Applications

• High-speed bearings, rollers, sliders
• Wafer positioning pins, insulation posts
• RTP hot chucks, thermal ramps, furnace plates
• Automation guides, IC test socket fixtures
• Valve seats, spray nozzles, combustion components

Key Properties

• Density: ~3.2 g/cm³ (lightweight)
• Excellent thermal shock resistance
• High flexural strength and toughness
• Low thermal expansion, good insulation
• Chemically stable in harsh environments