一體成型抗靜電陶瓷(非表面做抗靜電coating)Bulk ESD ceramic with no surface coating

一體成型抗靜電陶瓷｜真正內含導電機能的高潔淨陶瓷解決方案

在半導體、光電、生醫等高潔淨產業中，靜電累積可能導致粉塵吸附、設備誤動作甚至產品損壞。 傳統解法多以陶瓷表面塗上抗靜電塗層（coating），但易因高溫、清洗或長期摩擦而剝落，影響穩定性與潔淨度。

從本體導電，根本解決靜電問題

徽亞科技提供的 一體成型抗靜電陶瓷（Bulk ESD Ceramics）， 採用特殊粉體配方與燒結技術，將導電功能直接內嵌於陶瓷本體中。 無需表面塗層，即可長期穩定耗散靜電，同時保有陶瓷原有的高純度、強度與耐化性能。

與傳統塗層陶瓷不同，一體成型陶瓷在最終成型後的任何形狀、切削或加工狀態下，整體皆具抗靜電阻抗， 不會因表面鍍層脫落而失效，避免產生感應式靜電的潛在風險。

嚴格符合國際抗靜電測試標準

所有產品在出貨前皆採用 美國進口儀器進行量測，並依據國際標準 ANSI/ESD Association Standards 進行電阻測試與驗證，包括但不限於：

• Garments (STM2.1)、Work surfaces (S4.1)、Flooring (S7.1)、Footwear (STM9.1)
• Planar materials (STM11.11)、Volume resistance (STM11.12 and IEC 61340-2-3)
• Seating (STM12.1)、Two point resistance (STM11.13)
• Flooring/Footwear system (STM97.1)

靜電的產生包含 接觸式與感應式，在高階製程中，即使是未接觸產品的部位，若未妥善控管靜電阻抗， 也可能因感應效應造成放電風險。若使用傳統塗膜處理的抗靜電陶瓷，只要有一小區域鍍層缺失或剝落，即可能產生 局部導電或絕緣失效，進而影響良率與可靠性。

一體成型抗靜電陶瓷則為整體均質導電結構，即使在高精密加工後仍保有一致的抗靜電效能，無塗層剝落風險， 是符合高潔淨製程與感應式靜電防護需求的理想材料。

一體成型與表面塗層型陶瓷比較

適用場景

• 抗靜電晶圓搬運與夾具應用說明
  徽亞科技專注於高潔淨製程中使用的抗靜電陶瓷零組件設計與應用，包括晶圓搬運手臂、真空吸盤、夾具、封裝平台 CHUCK、雷射平台、對位載具，以及生醫設備用的 CIP/SIP 結構與無塵室導電部件。
  在半導體與光電製程中，抗靜電結構可有效降低靜電放電（ESD）風險，保護晶圓與敏感元件。應用場景包含：
  晶圓搬運：防止靜電破壞晶圓表面，確保運輸安全。
  自動化裝卸：減少吸附與滑動，提升精度與穩定性。
  清洗製程：避免靜電吸附灰塵微粒，確保清潔效果。
  測試與檢查：消除靜電干擾，提升量測準確性。
  封裝階段：保護元件，降低靜電釋放造成的損傷風險。
  所有產品皆可依需求提供一體成型抗靜電陶瓷或複合材質結構，適用於高溫、真空與潔淨等製程環境。

Bulk ESD Ceramic｜Integrated Static Dissipation with Long-Term Stability

In semiconductor, optoelectronics, and pharmaceutical industries, electrostatic discharge (ESD) can lead to particle attraction, device malfunction, or product failure. Traditional ESD solutions often rely on surface coatings applied to ceramic components. However, these coatings are susceptible to degradation due to high temperature, cleaning, or friction over time, potentially compromising ESD performance and cleanliness.

True ESD Function Embedded in Ceramic Body

Huiya Technology offers Bulk ESD Ceramics – anti-static ceramics engineered with functional conductivity integrated directly into the ceramic matrix. This sintered ceramic exhibits stable surface and volume resistivity without the need for external coating, while maintaining the original mechanical strength, chemical resistance, and purity of technical ceramics.

Unlike coated ceramics, bulk ESD ceramics provide uniform anti-static resistance throughout the entire component, regardless of post-processing, shape, or surface condition. This eliminates the risk of discharge due to coating delamination or uneven conductivity.

ANSI/ESD Certified Testing Standards

All products are tested before shipment using precision U.S.-made instruments and conform to international ESD test protocols based on ANSI/ESD Association Standards, including but not limited to:

• Garments (STM2.1), Work surfaces (S4.1), Flooring (S7.1), Footwear (STM9.1)
• Planar materials (STM11.11), Volume resistance (STM11.12, IEC 61340-2-3)
• Seating (STM12.1), Two-point resistance (STM11.13)
• Flooring/Footwear combination (STM97.1)

Electrostatic discharge can occur through both contact and induction. In high-end fabs, even areas of a component that do not directly touch the product must avoid using conductive materials (e.g., metal), as induced static can still cause damage. Traditional anti-static coatings risk failure if any small section is missed or peels off, leading to unexpected conductive or insulating zones.

In contrast, Bulk ESD Ceramic is sintered with integrated resistive properties throughout the entire structure. No matter how it is machined, drilled, or shaped, it maintains consistent electrostatic dissipation, offering superior long-term reliability.

Comparison: Coated vs. Bulk ESD Ceramic

Applications

• Wafer handling arms, vacuum pads, ESD-compatible jigs and holders
• Alignment chucks, laser processing stages, packaging support modules
• CIP/SIP modules in biotech or cleanroom-rated contact structures
• Components requiring repeated cleaning or friction exposure

Available Resistance Range & Options

Bulk ESD Ceramic typically offers volume resistivity in the range of: 10⁵ ~ 10⁹ Ω•cm, suitable for most ESD-safe and cleanroom applications.

• Material Base: Alumina, Zirconia, Hybrid conductive ceramic
• Surface Appearance: Black / gray / light gray options available
• Customization: Support for drawings, custom sizes, and additional surface treatments

For long-term ESD stability, uniform protection, and high-purity performance in sensitive processes, Huiya Technology provides fully integrated bulk ESD ceramics backed by ANSI/ESD-compliant testing. Contact us for samples, customization, and application consultation.