光電與太陽能製程陶瓷零件（Ceramic Components for Photovoltaic & Optoelectronic Processes）
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光電與太陽能製程陶瓷零件｜高潔淨耐蝕陶瓷結構件
產品介紹
光電與太陽能製程中需大量使用具備耐高溫、抗化學、絕緣、低粒子釋出的陶瓷零件，以確保模組效率與製程穩定性。徽亞科技提供多款陶瓷應用解決方案，涵蓋 PECVD、雷射加工、晶圓搬運、真空載具、熱壓壓頭等應用，支援客製尺寸與結構加工。
典型陶瓷零件
- 陶瓷手臂 / 真空吸盤
- 陶瓷CHUCK / 支撐平台
- 陶瓷熱壓頭 / 壓合蓋板
- PECVD 腔體內襯 / 陶瓷電極
- 雷射載具 / 定位隔熱墊
可選材料
- 氧化鋁（Al₂O₃）：絕緣耐磨、性價比高
- 碳化矽（SiC）：耐等離子蝕刻、熱導率高
- 氮化鋁（AlN）：導熱與絕緣兼具
- 石英（Quartz）：高純度、低熱膨脹
- 抗靜電陶瓷：防止感應放電與粉塵吸附
應用產線
- 太陽能電池製程（PECVD、鋁背場、雷射劃線）
- LED / Micro LED 雷射封裝模組
- 光電感測器製程支撐平台
- 雷射加工載具 / 熱處理升降盤
Ceramic Components for Photovoltaic & Optoelectronic Manufacturing
Product Overview
Ceramic parts are essential in photovoltaic and optoelectronic processes due to their thermal stability, chemical resistance, electrical insulation, and low particle generation. Huiya Technology supplies precision ceramic components for PECVD chambers, laser modules, vacuum chucks, and hot pressing stations.
Typical Applications
- Ceramic arms & vacuum pads
- Ceramic chucks & base plates
- Hot press heads & alignment blocks
- PECVD ceramic liners & electrodes
- Laser alignment carriers & thermal blocks
Material Options
- Alumina (Al₂O₃): high insulation, cost-effective
- Silicon Carbide (SiC): plasma-resistant, thermally stable
- Aluminum Nitride (AlN): thermally conductive and insulating
- Quartz: high-purity, ultra-low expansion
- ESD-safe ceramics: eliminate charge-induced contamination
Industries Served
- Solar cell processing (PECVD, PERC, laser scribing)
- LED / Micro LED packaging tools
- Optical sensor module assembly
- Laser processing & thermal positioning platforms
-
光電與太陽能製程陶瓷零件｜高潔淨耐蝕陶瓷結構件
產品介紹
光電與太陽能製程中需大量使用具備耐高溫、抗化學、絕緣、低粒子釋出的陶瓷零件，以確保模組效率與製程穩定性。徽亞科技提供多款陶瓷應用解決方案，涵蓋 PECVD、雷射加工、晶圓搬運、真空載具、熱壓壓頭等應用，支援客製尺寸與結構加工。
典型陶瓷零件
- 陶瓷手臂 / 真空吸盤
- 陶瓷CHUCK / 支撐平台
- 陶瓷熱壓頭 / 壓合蓋板
- PECVD 腔體內襯 / 陶瓷電極
- 雷射載具 / 定位隔熱墊
可選材料
- 氧化鋁（Al₂O₃）：絕緣耐磨、性價比高
- 碳化矽（SiC）：耐等離子蝕刻、熱導率高
- 氮化鋁（AlN）：導熱與絕緣兼具
- 石英（Quartz）：高純度、低熱膨脹
- 抗靜電陶瓷：防止感應放電與粉塵吸附
應用產線
- 太陽能電池製程（PECVD、鋁背場、雷射劃線）
- LED / Micro LED 雷射封裝模組
- 光電感測器製程支撐平台
- 雷射加工載具 / 熱處理升降盤
Ceramic Components for Photovoltaic & Optoelectronic Manufacturing
Product Overview
Ceramic parts are essential in photovoltaic and optoelectronic processes due to their thermal stability, chemical resistance, electrical insulation, and low particle generation. Huiya Technology supplies precision ceramic components for PECVD chambers, laser modules, vacuum chucks, and hot pressing stations.
Typical Applications
- Ceramic arms & vacuum pads
- Ceramic chucks & base plates
- Hot press heads & alignment blocks
- PECVD ceramic liners & electrodes
- Laser alignment carriers & thermal blocks
Material Options
- Alumina (Al₂O₃): high insulation, cost-effective
- Silicon Carbide (SiC): plasma-resistant, thermally stable
- Aluminum Nitride (AlN): thermally conductive and insulating
- Quartz: high-purity, ultra-low expansion
- ESD-safe ceramics: eliminate charge-induced contamination
Industries Served
- Solar cell processing (PECVD, PERC, laser scribing)
- LED / Micro LED packaging tools
- Optical sensor module assembly
- Laser processing & thermal positioning platforms
